|
Active axis |
- |
RX |
RX, RY |
RX, RY |
|
Angular displacement |
mrad |
20 |
5 |
10 |
|
Unloaded resonance frequency |
Hz |
2180 |
2600 |
1750 |
|
Angular resolution |
μrad |
0,1 |
1 |
1 |
|
Voltage range |
V |
-20...150 |
||
|
Capacitance (per electrical port) |
μF |
3,2 |
0,5 |
3 |
|
Dimensions (Ø×Z) |
mm |
55x25 |
45x22 |
65x40 |
|
Mass |
g |
200 |
65 |
310 |
|
Sensor Option |
- |
SG |
SG |
SG |