品牌：CEDRAT
應用包括光罩、鏡頭或檢測器定位、顯微掃描、像素移動、抖動和視線穩定。
共聚焦顯微鏡、光罩定位和檢查。
共聚焦顯微鏡、光罩定位和檢查。
|
Status |
- |
Preliminary |
Preliminary |
Standard |
Standard |
Preliminary |
Standard |
|
Active axis |
- |
TX |
TX |
TX, TY |
TX, TY |
TX, TY |
TX, TY, TZ |
|
Displacement (unloaded) |
μm |
55 |
110 |
25 |
200 |
400 |
200 |
|
Stiffness |
N/ μm |
1,2 |
0,26 |
2,5 |
0,59 |
0,14 |
0,59 |
|
Unloaded resonance frequency |
Hz |
1840 |
850 |
3000 |
580 |
260 |
380 |
|
Resolution |
nm |
5,5 |
11 |
3 |
20 |
40 |
20 |
|
Voltage range |
V |
-120...150 |
|||||
|
Capacitance (per electrical port) |
μF |
1,55 |
1,55 |
0,5 |
6,3 |
6,3 |
6,3 |
|
Dimensions (XxYxZ) |
mm |
30x30x12 |
30x30x12 |
50x50x16 |
100x100x22 |
100x100x27 |
100x100x49 |
|
Mass |
g |
23 |
23 |
80 |
450 |
500 |
540 |
|
Sensor option |
- |
SG |
SG |
SG, ECS |
SG, ECS |
SG, ECS |
SG, ECS |
